Keyence SI-F80RU

Spectroscopy Unit. . Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series

MPN
SI-F80RU
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What is the Keyence SI-F80RU?

Spectroscopy Unit. SI-F80RU. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series

Specifications

Specifications

Model NameSpectroscopy Unit
Model CodeSI-F80RU
Series TitleSpectral-Interference Wafer Thickness Meter
Series CodeSI-F80R series
Data Sheet URLhttps://www.keyence.com/download/download/confirmation/?dlSeriesId=WS_SR49623&dlModelId=PM_216F8RU&dlSiteId=1&dlLanguageId=en-US&dlLangType=en-US
CAD URLhttps://www.keyence.com/products/measure/spectral/si-f80r/downloads/?mode=cd&modelId=PM_216F8RU
ModelSI-F80RU
TypeWafer Thickness Measurement Type Spectrum Unit
Measurement range10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*1
Possible detection distance80 to 81.1 mm 3.15" to 3.19"
Light sourceInfrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*2)
Spot diameterø25 µm*3
Linearity±0.1 µm ±0.000004" (when n=3.5)*4
Resolution0.001 µm *5
Sampling cycle200 µs
LED displayTarget near center of measurement range : green lights. Target within measurement range : orange lights.Target outside measurement range : flashes orange.
Temperature fluctuation0.01% of F.S./°C
Environmental resistance - Enclosure rating-
Environmental resistance - Ambient lightIncandescent lamp or Fluorescent lamp: 10,000 lux max.
Environmental resistance - Ambient temperature0 to +35 °C 32 to 95 °F
Environmental resistance - Relative humidity35 to 80 % RH (No condensation)
Environmental resistance - Vibration resistance10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions
MaterialPolycarbonate
WeightApprox. 1.2 kg

SI-F80RU: frequently asked questions

When can SI-F80RU be shipped?

SI-F80RU is sourced on request — request a quote and we'll confirm the exact availability and shipping timeline for this specific unit.

Can I pick up SI-F80RU in person?

Local pickup from our Groningen, Netherlands warehouse may be possible — contact us before ordering to check availability and arrange a collection time.

Is express delivery available?

Yes — mention it when you request a quote for SI-F80RU and we'll include express shipping options in our reply.

My factory is down and I need this urgently — can you help?

For a critical breakdown, contact us directly at +31 (0)50-7110348 or sales@partnerplc.com — we can look into same-day courier or dedicated taxi/hotshot delivery for SI-F80RU, subject to availability and destination.

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Keyence SI-F80RUPrice and lead time confirmed within 1 business day
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