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Keyence SI-F80R

Sensor Head, Wafer Thickness Measurement Type.

MPN: SI-F80R
Category: Spectral-Interference Wafer Thickness Meter

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What is the Keyence SI-F80R?

Sensor Head, Wafer Thickness Measurement Type. SI-F80R. Series: Spectral-Interference Wafer Thickness Meter. Series code: SI-F80R series

Specifications

Model Name	Sensor Head, Wafer Thickness Measurement Type
Model Code	SI-F80R
Series Title	Spectral-Interference Wafer Thickness Meter
Series Code	SI-F80R series
Data Sheet URL	https://www.keyence.com/download/download/confirmation/?dlSeriesId=WS_SR49623&dlModelId=PM_216F80R&dlSiteId=1&dlLanguageId=en-US&dlLangType=en-US
CAD URL	https://www.keyence.com/products/measure/spectral/si-f80r/downloads/?mode=cd&modelId=PM_216F80R
Model	SI-F80R*1
Type	Wafer thickness measurement type Sensor head
Measurement range	10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*2
Possible detection distance	80 to 81.1 mm 3.15" to 3.19"
Light source	Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3)
Spot diameter	ø25 µm ø0.000984"*4
Linearity	±0.1 µm ±0.000004" (when n=3.5)*5
Resolution	0.001 µm *6
Sampling cycle	200 µs
LED display	Target near center of measurement range : green lights. Target within measurement range : orange lights.Target outside measurement range : flashes orange.
Temperature fluctuation	―
Environmental resistance - Enclosure rating	IP64
Environmental resistance - Ambient light	Incandescent lamp or Fluorescent lamp: 10,000 lux max.
Environmental resistance - Ambient temperature	0 to +50 °C 32 to 122 °F
Environmental resistance - Relative humidity	35 to 85 % RH (No condensation)
Environmental resistance - Vibration resistance	10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions
Material	SUS
Weight	Approx. 70 g (including cable)

SI-F80R: frequently asked questions

When can SI-F80R be shipped?

SI-F80R is sourced on request — request a quote and we'll confirm the exact availability and shipping timeline for this specific unit.

Can I pick up SI-F80R in person?

Local pickup from our Groningen, Netherlands warehouse may be possible — contact us before ordering to check availability and arrange a collection time.

Is express delivery available?

Yes — mention it when you request a quote for SI-F80R and we'll include express shipping options in our reply.

My factory is down and I need this urgently — can you help?

For a critical breakdown, contact us directly at +31 (0)50-7110348 or sales@partnerplc.com — we can look into same-day courier or dedicated taxi/hotshot delivery for SI-F80R, subject to availability and destination.